- Overview
- Product Description
- Product Parameters
- Detailed Photos
Basic Info.
Model NO.
CY-PECVD-450
Material
Stainless Steel
Type
Tubular Furnace
RF Power Supply Cooling Method
Air-Cooling
Heating Zone
Single Heating Zone 200mm
Temperature Accuracy
+-1c
Furnace Tube Material
High Purity Quartz
Furnace Tube Size
Dia. 50*1200mm
Adjustable Speed
0-20rpm
Transport Package
Standard Export Wooden Packaging
Trademark
CYKY
Origin
Zhengzhou Henan China
HS Code
8401200000
Production Capacity
50sets Per Month
Product Description
PECVD Plasma Enhanced Chemical Vapor Deposition for Amorphous silicon and microcrystalline silicon films
Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.
We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact customer service
chemical vapor deposition adopts plasma enhanced chemical vapor deposition technology, which can use high-energy plasma to promote the reaction process, effectively increase the reaction speed and reduce the reaction temperature.
It is suitable for depositing thin films of silicon nitride, amorphous silicon and microcrystalline silicon on different substrates such as optical glass, silicon, quartz and stainless steel. It has good film-forming quality, less pinholes and is not easy to crack. It is suitable for the preparation of amorphous silicon and microcrystalline silicon thin film solar cell devices. It can be widely used in the scientific research and small batch preparation of thin film materials in Colleges and universities and scientific research institutes.
| RF power supply | Signal frequency | 13.56MHz | |
| Power output range | 0~500W | ||
| Maximum reflected power | 100W | ||
| Reflected power (at maximum power) | <5W | ||
| Power stability | ±0.1% | ||
| Working Chamber | Heating temperature | RT-1000ºC | |
| Temperature control accuracy | ±1ºC | ||
| Sample holder | Φ200mm | ||
| Rotating speed of sample holder | 1-20rpm adjustable | ||
| Spray head size | Φ90mm | ||
| Distance | The distance between the spray head and the sample is 40-100mm continuously adjustable | ||
| Working vacuum for deposition | 0. 133- 133Pa (can be adjusted according to the technical process) | ||
| Flange | The top flange can be lifted by the motor, the substrate is easy to change, and there is a visual window | ||
| Chamber | Stainless steel material, Φ500mm * 500mm | ||
| Observation window | Φ100mm, with baffle | ||
| Gas supply system | Channel numbers | 6 | |
| Measuring unit | Mass flow controller | ||
| Measuring range | A channel: 0~200SCCM for H2 | Remarks: If other ranges are required, please specify when ordering. According to the customer's specific requirements, the flow meter of corresponding gas type and range is optional. | |
| B channel: 0~200SCCM for CH4 | |||
| C channel: 0~200SCCM for C2H4 | |||
| C channel: 0~500SCCM for N2 | |||
| D channel: 0~500SCCM for NH3 | |||
| E channel: 0~500SCCM for Ar | |||
| Measurement accuracy | ±1.5%F.S | ||
| Working pressure difference | -0.15Mpa~0.15Mpa | ||
| Connecting pipe | 304 stainless steel | ||
| Gas channel | 304 stainless steel needle valve | ||
| Interface specification | 1/4" ferrule connector for gas inlet and outlet | ||
| Vacuum system | Backing pump | 4.7L/s | |
| Molecular pump | 1200L/s | ||
| Vacuum measurement | Compound vacuum gauge, range 10-5Pa ~ 105Pa | ||
| Vacuum degree | 5.0*10-3Pa | ||
| Water chiller | Cooling water temperature | <=37ºC | |
| Water flow | 10L/min | ||
| Power | 0.1KW | ||
| Cooling power | 50W/ºC | ||
| Power supply | AC220V 50Hz | ||
Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.
We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact customer service